|型号：真空蒸镀-手套箱设备                                                                                          

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       该设备由热阻真空镀膜系统和手套箱组成，主要用来辅助完成太阳能电池、场效应晶体管等电子器件的制备。其中热阻真空镀膜系统由四组蒸发源（金属蒸发源和有机蒸发源各两个）。